This page lists Mirrorcle’s standard dual-axis MEMS Mirrors with some of the key specifications and links to example characterization reports of typical devices of a given design as made at outgoing inspection time. First table lists all of the available integrated MEMS Mirrors (mirror is monolithically integrated with the actuator). Second table lists all of the available actuators which together with a given mirror form a bonded MEMS Mirror part number.
Full Device Datasheets for many of the more frequently used MEMS Mirror products including single-axis resonant mirrors are available at our Documentation Portal.
Integrated MEMS Mirrors
| Actuator Name | Mechanical Angle [°] | Die Size [mm] | Mirror Diameter [mm] | |
|---|---|---|---|---|
| A3I8.2-800AL | ±6 | 4.25 x 4.25 | 0.8 | ✓ |
| A7M8.1-800AL | ±4.75 | 5.20 x 5.20 | 0.8 | ✓ |
| A7M10.2-1000AL | ±4.75 | 5.20 x 5.20 | 1.0 | ✓ |
| A3I12.2-1200AL | ±5 | 4.25 x 4.25 | 1.2 | ✓ |
| A7M20.2-2000AL | ±5 | 5.20 x 5.20 | 2.0 | ✓ |
| A5M24.3-2400AL | ±5.5 | 7.25 x 7.25 | 2.4 | ✓ |
| A9M12.2-1200AL | ±7.5 | 5.20 x 5.20 | 1.2 | ✓ |
Bonded MEMS Mirrors
| Actuator Name | Mechanical Angle [°] | Die Size [mm] | Mirror Diameter [mm] | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 2.0 | 2.4 | 3.0 | 3.6 | 4.2 | 4.6 | 5.0 | 6.4 | 7.5 | |||
| A7B1.3 | ±7 | 5.20 x 5.20 | ✓ | ✓ | ✓ | ✓ | NR | NR | NR | NR | NR |
| A7B2.3 | ±6 | 5.20 x 5.20 | NR | ✓ | ✓ | ✓ | NR | NR | NR | NR | NR |
| A8L2.2 | ±5 | 7.25 x 7.25 | NR | NR | ✓ | ✓ | ✓ | ✓ | ✓ | NR | NR |
| A5L3.3(C2) | ±4.25 | 7.25 x 7.25 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | NR |
| A5L3.3 | ±2.5 | 7.25 x 7.25 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | NR |
| A5L2.2 | ±1.15 | 7.25 x 7.25 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
* NR = Not Recommended