Specifications

Below are specifications of the various scanning micromirror MEMS devices with representative datasheets

Actuator Name	Mechanical Angle [°]	Die Size [mm]	Mirror Diameter [mm]	PDF
A3I8.2-800AL	±6	4.25 x 4.25	0.8	✓
A3I12.2-1200AL	±5	4.25 x 4.25	1.2	✓
A7M20.1-2000AL	±5	5.20 x 5.20	2.0	✓
A5M24.1-2400AL	±5	7.25 x 7.25	2.4	✓
A7M8.1-800AL	±4.75	5.20 x 5.20	0.8	✓

Actuator Name	Mechanical Angle [°]	Die Size [mm]	Mirror Diameter [mm]
Actuator Name	Mechanical Angle [°]	Die Size [mm]	2.0	2.4	3.0	3.6	4.2	4.6	5.0	6.4	7.5
A7B1.1	±7	5.20 x 5.20	✓	✓	✓	✓	NR	NR	NR	NR	NR
A7B2.1	±5.5	5.20 x 5.20	NR	✓	✓	✓	NR	NR	NR	NR	NR
A8L2.2	±5	7.25 x 7.25	NR	NR	✓	✓	✓	✓	✓	NR	NR
13Z2.1	±2.5	7.26 x 7.26	✓	✓	✓	✓	⍻	⍻	✓	NR	NR
A5L2.2	±1	7.25 x 7.25	✓	✓	⍻	⍻	✓	✓	✓	✓	✓

* ⍻ = Datasheet Not Available
* NR = Not Recommended

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