Below are specifications of the various scanning micromirror MEMS devices with representative datasheets

Actuator NameMechanical Angle [°]Die Size [mm]Mirror Diameter [mm]PDF
A3I8.2-800AL±64.25 x 4.250.8
A7M8.1-800AL±4.755.20 x 5.200.8
A7M10.2-1000AL±4.755.20 x 5.201.0
A3I12.2-1200AL±54.25 x 4.251.2
F1M16.2-1600AL±4.55.20 x 5.201.6
A7M20.2-2000AL±4.85.20 x 5.202.0
A5M24.2-2400AL±57.25 x 7.252.4

Actuator NameMechanical Angle [°]Die Size [mm]Mirror Diameter [mm]
A7B1.1±75.20 x 5.20NRNRNRNRNR
A7B2.1±5.55.20 x 5.20NRNRNRNRNRNR
A8L2.2±57.25 x 7.25NRNRNRNR
A5L3.3(C2)±4.257.25 x 7.25NRNR
A5L3.3(C1)±2.57.25 x 7.25NR
A5L2.2±17.25 x 7.25
* = Datasheet Not Available
* NR = Not Recommended