Integrated MEMS Mirrors

Integrated Mirrors of up to 2.4mm diameter are monolithically fabricated as an integrated part of the gimbal-less actuator device structure. They are the central area of the silicon die and share the same microfabrication steps as the surrounding electrostatic actuators. These mirrors are constructed of the same available silicon layers, featuring nearly perfectly flat and smooth silicon surfaces. On four sides, the mirrors are connected to bi-axial linkages that provide two-axis movement. Since 2016, we continually stock devices with integrated mirrors in the following diameters: 0.8mm, 1.2mm, 2.0mm and 2.4mm. All in-stock integrated mirrors are coated with pure Aluminum, which gives high reflectivity across a very wide range of wavelengths. Metallization with Gold can be done on wafer scale, and is therefore available for larger, production orders.

  • Mirror Sizes: 0.8 mm, 1.2mm, 1.6mm, 2.0mm, and 2.4mm diameter in stock.
  • Maximum tilt angle under point-to-point driving:-6° to +6° mechanical each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical
  • Single-Axis Option: Most designs can be provided arranged for pure single-axis motion.
Actuator NameMechanical Angle [°]Die Size [mm]Mirror Diameter [mm]PDF
A3I8.2-800AL±64.25 x 4.250.8
A3I12.2-1200AL±54.25 x 4.251.2
A7M20.1-2000AL±55.20 x 5.202.0
A5M24.1-2400AL±57.25 x 7.252.4
A7M8.1-800AL±4.755.20 x 5.200.8