Bonded MEMS Mirrors

  • Bonded Mirror Sizes: 2.0, 2.4, 3.0, 3.6, 4.2, 4.6mm, and 5.0mm, 6.4mm, and 7.5mm diameter in stock.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type, and in some cases is limited by mirror size.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical, in some cases limited by mirror size.
  • Single-Axis Option: In-stock single-axis actuators can be combined with many of the available mirror sizes.
Actuator NameMechanical Angle [°]Die Size [mm]Mirror Diameter [mm]
2.02.43.03.64.24.65.06.47.5
A7B1.1±75.20 x 5.20NRNRNRNRNR
A7B2.2±5.55.20 x 5.20NRNRNRNRNRNR
A8L2.2±57.25 x 7.25NRNRNRNR
13Z2.1±2.57.26 x 7.26NRNR
A5L2.1±17.25 x 7.25
* = Datasheet Not Available
* NR = Not Recommended