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MirrorcleTech MEMS Mirror Development Kit

Scanning, two axis (tip-tilt) mirrors are a fundamental optical beam steering technology required in a wide variety of applications across many industries. Mirrorcle's MEMS mirror technology provides a highly competitive solution to cater to many of those applications due to its capability to control mirrors to tip/tilt at arbitrary angles in two orthogonal axes, or two rotational degrees of freedom. For example, a laser beam pointed at the micromirror could be deflected to any angle from -12° to +12° (specifications vary for different designs) on either or both axes, and therefore anywhere in a 24° field of regard cone. When a wide-angle lens is employed (see add-ons below,) field of regard of over 45° for each axis is easy to achieve.

Mirrorcle Technologies gimbal-less two-axis mirrors are driven by electrostatic actuators. Their angle of rotation closely follows a square law, i.e. angle is proportional to the square of applied voltage. This inherent non-linearity is linearized by specialized, bias-differential driving circuits. Mechanically, the mirrors behave approximately as second-order (mass-spring) systems with a high Q of nearly 50-80, and therefore require properly conditioned drive signals to obtain well controlled performance. In open-loop driving, smoothing of applied voltage waveforms (input shaping and/or filtering) prevents overshoot and mechanical ringing at device resonance. Mirrorcle Technologies software and hardware drivers implement multiple methodologies to provide linearization and fast and stable point-to-point beam steering.

Devices can also be driven in closed-loop for feedback-based damping. The MEMS mirrors do not necessarily require an inherent position sensing capability due to their exceptional repeatability in open loop control. Nevertheless, they may be equipped or packaged with external position sensors for closed loop control operation. Further technical details are made available in the Development Kit Overview and in additional documents and scientific publications on the support web page.

Mirrorcle Technologies MEMS Mirror Development Kit allows a user to quickly and efficiently gain familiarity with all aspects of these devices and their various possible uses. Furthermore, it enables safe operation of the devices with specifically developed software and MEMS driver solutions which include several levels of protection for the micromirror devices.

Development Kit users are able to display a variety of vector graphics as well as multiframe animations at arbitrary refresh rates. Scanners can be operated in point-to-point vector scanning or resonant and rastering modes. The system is highly adaptable to projection on various surfaces and in a variety of applications, including projection on specially-coated transparent surfaces. The ultra-low power consumption of the MEMS devices makes the system highly portable and miniature - the kit is very light-weight and fully mobile when used with a laptop computer.

See some additional features of the development kits.

Mirrorcle Standard Development Kit
(Individual MEMS mirrors and accessories)

Mirrorcle Development Kit with a Scan Module
(MEMS mirror and laser in an optical cell)

4-Quadrant Development Kit 4-Quadrant Development Kit

Standard Development Kit Includes:

  • Three Gimbal-less Dual-Axis MEMS Mirrors. First mirror is integrated 1.2mm (diameter) with +-5° of mechanical angle (A3I12). Second mirror is integrated, 2.0mm diameter with +-5° of mechanical angle (A7M20). Third mirror is bonded, 3.6mm diameter with +-5.5° of mechanical angle (A7B2 actuator). All three mirrors are Aluminum coated. Each mirror device is packaged in a tinyPCB LCC20 3.x for easy handling, mounting and connection to the USB MEMS Controller. Each device is covered with an anti-reflection coated window. User can choose among three available anti-reflection coatings listed on the support web page.

  • Mirrorcle Software Suite 10.2 with extensive MEMS mirror driving capabilities in multiple Windows executables (XP, Vista, Win7, Win8) and 3 comprehensive SDKs. (Detailed descriptions here)
    • MirrorcleDraw executable for Windows with an easy to use Graphical User Interface
    • MirrorcleLinearRaster is a console application for Windows (XP, Vista, Win7, Win8)
    • MTIDevice-Demo is a console application demonstrating several mirror control methods from the C++ SDK
    • MirrorcleListDevices is a console application which lists all connected and available Controllers and their info
    • Software Development Kit for C++ (details)
    • Software Development Kit for Matlab (details)
    • Software Development Kit for LabVIEW (details)

  • USB MEMS Controller
    • USB-SL Option Includes:
      Controller. Mirrorcle-designed controller board provides USB communication, 16-bit driving for MEMS devices, and programmable hardware filtering to avoid overshoot and ringing. Also included is a digital output port with 8 digital lines synchronous with MEMS drive, as well as two analog inputs. Controller runs at rates of up to 120k samples-per-second for driving of the X- and Y-axis and of the digital output port. Onboard 500kB RAM allows storage of up to 100k samples. Controller is USB bus-powered and provides power for the embedded MEMS driver. System can therefore run solely on a laptop, powered by its battery. Interfacing and controlling the board is provided by C++ functions of the Windows API, by a Matlab API, or by LabView functions, as shown in many SDK examples and executable programs included with the Mirrorcle Software Suite.
      • Embedded 4-Channel MEMS Driver. Converts serial digital input from the Controller Board to four channels of ~0 to 160 Volts per channel, to drive 4-quadrant MEMS mirrors. Allows up to 15 kHz bandwidth actuation (typically lower due to user-chosen filter settings). Also included are programmable hardware-based low-pass filters and protection circuitry to reduce the chances of device damage. Powered directly from the Controller Board (from USB bus).
      • Includes USB cable and two 10-pin ribbon cables for MEMS drive and digital output.

  • MEMS Mirror Device Mount on a miniPCB. A small printed circuit board with a header connector socket for connecting the MEMS mirror tinyPCB for easy mounting and experimenting with MEMS mirrors. A ribbon-cable connector provides connection to the USB MEMS Controller's output. The PCB is mounted on a 2DoF kinematic mount and a ½” post (listed in the Optical Breadboarding below) for easy integration in standard optical benches and boards.

  • Optical Breadboarding. A 4.5”x4.5” optical breadboard with 1/4"-20 thread holes. Includes 2 post holders, 1 two-axis kinematic stage (micromirror device mount,) 90-degree laser holder and posts. Designed to be highly flexible and modular, and compatible with standard optical breadboarding equipment.

  • 5 mW (Class IIIa) Red (635 nm) Laser. Red laser with a small ~1mm diameter beam which works well with most of our mirror sizes includes modulation capability for fast on/off control. Miniature, rugged design (10mm diameter x 30mm length). Great for experimentation with various vector graphics capabilities of our devices and software, and for development of synchronized digital outputs and/or triggers that are available with the Mirrorcle's USB Controller. Great for laser tracking when combined with the Laser Tracking Bundle Add-On.

Semi-Custom Development Kit Includes:

  • User Chooses Three Gimbal-less Dual-Axis MEMS Mirrors - Types, Sizes, Coatings, and Packages. In a standard development kit (see above) the three mirror sizes and actuators are preselected and premanufactured to reduce cost and delivery time. However if users wish to choose other mirror and actuator types, sizes, coatings and type of packaging, it is available in this category. User can select among various available 4-quadrant actuators to best suit their application, and select among all available mirror sizes from 0.6mm up to 5.0mm diameter. Mechanical tilt angle depends on the chosen actuator type. Aluminum and Gold coatings are available. For more information and options see support web page.

Development Kit with a Scan Module Includes:

  • Scan Module in Optomechanical Cell, type Eazy. In a standard development kit (see above) there are three individual mirrors included which can be used with kit accessories or other user optics. The Scan Module option on the other hand includes only one MEMS mirror of 1.2mm diameter (A3I12.2-1200AL) which is pre-assembled into a optomechanical cell with a laser and with wide-angle optics. With this option users can experiment and develop laser beam scanning applications with optical scanning angles of -20° to +20° with a high speed mirror with all optics pre-aligned, assembled, and enclosed in an easy-to-use Scan Module. Standard version includes a red laser with 3-8mW of output power with fast on-off modulation capability. Other wavelengths are possible too with longer lead times.

Optional Add-ons :

  • Wide-Angle-Lens. Custom designed and built afocal lens with 3 lens elements that will magnify the optical scan-angles of the system by approximately 3X. This magnification is substantially linear, resulting in overall development kit scan capability of over 45°. Lens has 1/2" and 1" diameter elements and comes mounted on a 1/2 " optical post. Lens elements are anti-reflection coated for visible wavelengths.

  • Wireless Option (for USB-SL Development Kits). Adds wireless communication (over Bluetooth) capability in addition to the USB communication to the Mirrorcle USB MEMS controller (USB-SL). When wireless communication is used, users should provide 5VDC battery or USB power to the controller's USB input port. Also used with Android Development Kit.

  • Laser Tracking Bundle. A bundle that extends the capabilities of the USB-SL Controller and Mirrorclce API by providing users a quick route to prototyping and development of laser tracking applications. Bundle includes a high sensitivity photosensor with an optical daylight filter and a multi-stage amplifier designed for noise reduction. A sample retroreflective tape is included for marking laser tracking targets in the range of several to tens of meters. An example C++ Visual Studio project is included with several examples of use of the tracking library classes.

  • Android Development Kit. Includes "Wireless Option" Add-On (above). Adds wireless communication (over Bluetooth) capability to the Mirrorcle USB MEMS controller (USB-SL). Includes Mirrorcle's Android Java API for user's development of applications. An Android Tablet is included with pre-installed MirrorcleDraw and other demo apps. In addition to the Eclipse library and comprehensive user guides, example projects are provided with source codes.

  • Linux Development Kit. For development of applications with the Raspberry Pi platform. Includes a Raspberry Pi module pre-installed with executable examples as well as the Linux-compatible SDK with examples of source codes.

Price and Availability of Development Kits as described above:

  • Mirrorcle Standard Development Kit (with Mirrorcle USB MEMS Controller):
    • Standard $7,850 + shipping and handling. Delivery in less than 2 weeks after receipt of payment.
    • Semi-custom starts at $8,875 + shipping and handling, final cost depends on exact details of the offer. Delivery times vary, typical time is 3 weeks.


Add-Ons Available with Kit Purchase:

  • Wide-Angle-Lens add-on is additional $290.

  • Wireless Option add-on is additional $305, and it is availale only in USB-SL kits.

  • Laser Tracking Bundle add-on is additional $1995.

  • Android Development Kit add-on is additional $2625. (Includes Wireless Option)

  • Linux Development Kit add-on is additional $1950. (Includes Wireless Option)

Shipment and Terms info:

  • Please contact us for a formal quotation and availability of exact items you wish to order. For delivery times refer to quotation and order confirmation details. International Orders require pre-payment in the full amount of the quotation/order. Credit-card payments are accepted with added processing fees.

  • Mirrorcle Technologies' Terms and Conditions of Sale apply.

  • Contact: sales@mirrorcletech.com

(Last updated: 11/25/2016)

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