Facility

MTI has year-around access to 4" and 6" wafer-based CMOS and MEMS fabrication facilities. Micromirror fabrication and wafer-level testing is performed in a clean-room environment. Custom assembly of various device-types and mirror sizes, packaging, and package-level testing is performed in-house.

Staff

Our staff has several decades of combined experience in MEMS design, fabrication, and testing. Over the past eight years, the group (from various affiliations during that period) has fabricated a variety of successful MEMS as well as CMOS MEMS devices, and published dozens of technical publications. We have also often taught short-courses on MEMS design and fabrication.