Facility
MTI has year-around access to 4" and 6" wafer-based CMOS and MEMS fabrication facilities. Micromirror fabrication and wafer-level testing is performed in a clean-room environment. Custom assembly of various device-types and mirror sizes, packaging, and package-level testing is performed in-house.
Staff
Our staff has several decades of combined experience in MEMS design,
fabrication, and testing. Over the past eight years, the group (from various
affiliations during that period) has fabricated a variety of successful MEMS as
well as CMOS MEMS devices, and published dozens of technical publications. We have also often taught short-courses on MEMS design and fabrication. |
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